Granted Patent
Utility
US 5,500,312 · App. 08/321,362
Masks with low stress multilayer films and a process for controlling the stress of multilayer films
Inventors:
Lloyd R. Harriott, James A. Liddle, Cynthia A. Volkert, Warren K. Waskiewicz, David L. Windt
Patented Case
View Patent ↗
Granted: Mar 19, 1996
Filed: Oct 11, 1994
Inventors
Lloyd R. Harriott
James A. Liddle
Cynthia A. Volkert
Warren K. Waskiewicz
David L. Windt
Assignee (at issue)
AT&T CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.