Granted Patent
Utility
US 5,502,564 · App. 08/304,982
Substrate thickness measurement using oblique incidence multispectral interferometry
Inventor:
Anthony M. Ledger
Patented Case
View Patent ↗
Granted: Mar 26, 1996
Filed: Sep 13, 1994
Inventor
Anthony M. Ledger
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.