Granted Patent
Utility
US 5,504,437 · App. 08/460,053
Apparatus and method for electrical measurement of semiconductor wafers
Inventors:
Sadao Hirae, Hiroshi Okada, Hideaki Matsubara
Patented Case
View Patent ↗
Granted: Apr 2, 1996
Filed: Jun 2, 1995
Inventors
Sadao Hirae
Hiroshi Okada
Hideaki Matsubara
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.