IP Library Granted Patent US 5,506,400
Granted Patent Utility
US 5,506,400 · App. 08/220,103

Scanning type probe microscope

Inventors: Akihiko Honma, Kazutoshi Watanabe
Patented Case View Patent ↗
Granted: Apr 9, 1996 Filed: Mar 30, 1994
Inventors
Akihiko Honma
Kazutoshi Watanabe
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 5,506,400
App. No.
08/220,103
Filed
1994-03-30
Granted
1996-04-09
Kind
A