Granted Patent
Utility
US 5,509,974 · App. 08/434,153
Etch control seal for dissolved wafer process
Inventor:
Kenneth Maxwell Hays
Patented Case
View Patent ↗
Granted: Apr 23, 1996
Filed: May 2, 1995
Inventor
Kenneth Maxwell Hays
Assignee (at issue)
Rockwell International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.