Granted Patent
Utility
US 5,514,439 · App. 08/323,265
Wafer support fixtures for rapid thermal processing
Inventor:
Thomas Sibley
Patented Case
View Patent ↗
Granted: May 7, 1996
Filed: Oct 14, 1994
Inventor
Thomas Sibley
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.