Granted Patent
Utility
US 5,514,898 · App. 08/416,548
Semiconductor device with a piezoresistive pressure sensor
Inventor:
Siegbert Hartauer
Patented Case
View Patent ↗
Granted: May 7, 1996
Filed: Apr 3, 1995
Inventor
Siegbert Hartauer
Assignee (at issue)
TEXAS INSTRUMENTS DEUTSCHLAND GMBH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.