Granted Patent
Utility
US 5,516,626 · App. 08/296,276
Resist processing method
Inventors:
Tadahiro Ohmi, Tohru Nonaka, Motonobu Horikoshi, Masanobu Onodera
Patented Case
View Patent ↗
Granted: May 14, 1996
Filed: Aug 25, 1994
Inventors
Tadahiro Ohmi
Tohru Nonaka
Motonobu Horikoshi
Masanobu Onodera
Assignee (at issue)
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.