Granted Patent
Utility
US 5,518,528 · App. 08/322,224
Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
Inventors:
Glenn M. Tom, James V. McManus
Patented Case
View Patent ↗
Granted: May 21, 1996
Filed: Oct 13, 1994
Inventors
Glenn M. Tom
James V. McManus
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.