IP Library Granted Patent US 5,518,951
Granted Patent Utility
US 5,518,951 · App. 08/427,846

Method for making thin film piezoresistive sensor

Inventors: Bruce Paynter, Henry J. McCarrick, Joseph W. Adamic, Jr.
Patented Case View Patent ↗
Granted: May 21, 1996 Filed: Apr 26, 1995
Inventors
Bruce Paynter
Henry J. McCarrick
Joseph W. Adamic, Jr.
Assignee (at issue)
Span Instruments, Inc.

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Quick Facts
Patent No.
US 5,518,951
App. No.
08/427,846
Filed
1995-04-26
Granted
1996-05-21
Kind
A