Granted Patent
Utility
US 5,518,962 · App. 08/411,390
Planarized interlayer insulating film formed of stacked BPSG film and ozone-teos NSG film in semiconductor device and method for forming the same
Inventor:
Yukinobu Murao
Patented Case
View Patent ↗
Granted: May 21, 1996
Filed: Mar 28, 1995
Inventor
Yukinobu Murao
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.