IP Library Granted Patent US 5,523,639
Granted Patent Utility
US 5,523,639 · App. 08/284,246

Electrostatic actuator having ferroelectrics in which residual dielectric polarization is formed

Inventors: Iwao Okamoto, Isatake Kaitsu, Minoru Takahashi
Patented Case View Patent ↗
Granted: Jun 4, 1996 Filed: Aug 2, 1994
Inventors
Iwao Okamoto
Isatake Kaitsu
Minoru Takahashi
Assignee (at issue)
Fujitsu Limited

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Quick Facts
Patent No.
US 5,523,639
App. No.
08/284,246
Filed
1994-08-02
Granted
1996-06-04
Kind
A