Granted Patent
Utility
US 5,527,396 · App. 08/398,071
Deposited film forming apparatus
Inventors:
Keishi Saitoh, Tatsuyuki Aoike, Masafumi Sano, Mitsuyuki Niwa, Jinsho Matsuyama, Toshimitsu Kariya, Yuzou Kouda, Ryou Hayashi, Masahiko Tonogaki
Patented Case
View Patent ↗
Granted: Jun 18, 1996
Filed: Mar 3, 1995
Inventors
Keishi Saitoh
Tatsuyuki Aoike
Masafumi Sano
Mitsuyuki Niwa
Jinsho Matsuyama
Toshimitsu Kariya
Yuzou Kouda
Ryou Hayashi
Masahiko Tonogaki
Assignee (at issue)
CANON KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.