Granted Patent
Utility
US 5,528,082 · App. 08/235,010
Thin-film structure with tapered feature
Inventors:
Jackson Ho, Robert Allen, Tzu-Chin Chuang
Patented Case
View Patent ↗
Granted: Jun 18, 1996
Filed: Apr 28, 1994
Inventors
Jackson Ho
Robert Allen
Tzu-Chin Chuang
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.