Granted Patent
Utility
US 5,529,632 · App. 08/490,087
Microwave plasma processing system
Inventors:
Katsuo Katayama, Kyoichi Komachi, Hiroshi Mabuchi, Takeshi Akimoto
Patented Case
View Patent ↗
Granted: Jun 25, 1996
Filed: Jun 13, 1995
Inventors
Katsuo Katayama
Kyoichi Komachi
Hiroshi Mabuchi
Takeshi Akimoto
Assignees (at issue)
SUMITOMO METAL INDUSTRIES, LTD.
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.