Granted Patent
Utility
US 5,531,121 · App. 08/375,040
Micromachined integrated pressure sensor with oxide polysilicon cavity sealing
Inventors:
Douglas Ray Sparks, Ronald E. Brown, Robert Lawrence Healton, John C. Christenson
Patented Case
View Patent ↗
Granted: Jul 2, 1996
Filed: Jan 19, 1995
Inventors
Douglas Ray Sparks
Ronald E. Brown
Robert Lawrence Healton
John C. Christenson
Assignee (at issue)
DELCO ELECTRONICS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.