Granted Patent
Utility
US 5,532,192 · App. 08/355,757
Method of spiral resist deposition
Inventor:
Thomas E. Adams
Patented Case
View Patent ↗
Granted: Jul 2, 1996
Filed: Dec 14, 1994
Inventor
Thomas E. Adams
Assignee (at issue)
AT&T CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.