Granted Patent
Utility
US 5,532,497 · App. 08/360,115
Optical aligner equipped with luminance sensor on movable stage
Inventors:
Tadao Yasuzato, Hiroshi Nozue, Seiichi Shiraki
Patented Case
View Patent ↗
Granted: Jul 2, 1996
Filed: Dec 20, 1994
Inventors
Tadao Yasuzato
Hiroshi Nozue
Seiichi Shiraki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.