Granted Patent
Utility
US 5,536,971 · App. 08/144,285
Semiconductor device having a hollow around a gate electrode and a method for producing the same
Inventors:
Yoshiro Oishi, Daisuke Ueda
Patented Case
View Patent ↗
Granted: Jul 16, 1996
Filed: Oct 27, 1993
Inventors
Yoshiro Oishi
Daisuke Ueda
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.