Granted Patent
Utility
US 5,537,487 · App. 08/257,204
Pattern judging method, mask producing method, and method of dividing block pattern for use in block exposure
Inventors:
Masaaki Miyajima, Hiroshi Yasuda, Satoru Yamazaki, Kiichi Sakamoto
Patented Case
View Patent ↗
Granted: Jul 16, 1996
Filed: Jun 9, 1994
Inventors
Masaaki Miyajima
Hiroshi Yasuda
Satoru Yamazaki
Kiichi Sakamoto
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.