Granted Patent
Utility
US 5,538,921 · App. 08/362,616
Integrated circuit fabrication
Inventor:
Yaw S. Obeng
Patented Case
View Patent ↗
Granted: Jul 23, 1996
Filed: Dec 22, 1994
Inventor
Yaw S. Obeng
Assignee (at issue)
AT&T CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.