IP Library Granted Patent US 5,538,921
Granted Patent Utility
US 5,538,921 · App. 08/362,616

Integrated circuit fabrication

Inventor: Yaw S. Obeng
Patented Case View Patent ↗
Granted: Jul 23, 1996 Filed: Dec 22, 1994
Inventor
Yaw S. Obeng
Assignee (at issue)
AT&T CORP.

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Quick Facts
Patent No.
US 5,538,921
App. No.
08/362,616
Filed
1994-12-22
Granted
1996-07-23
Kind
A