Granted Patent
Utility
US 5,539,243 · App. 08/285,554
Semiconductor device having spaces and having reduced parasitic capacitance
Inventor:
Junichi Matsuki
Patented Case
View Patent ↗
Granted: Jul 23, 1996
Filed: Aug 3, 1994
Inventor
Junichi Matsuki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.