Granted Patent
Utility
US 5,541,023 · App. 08/067,623
X-ray mask, method of manufacturing the x-ray mask and exposure method using the x-ray mask
Inventors:
Kazuaki Kondo, Kenji Sugishima
Patented Case
View Patent ↗
Granted: Jul 30, 1996
Filed: May 28, 1993
Inventors
Kazuaki Kondo
Kenji Sugishima
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.