IP Library Granted Patent US 5,541,973
Granted Patent Utility
US 5,541,973 · App. 08/412,665

Micro area analyzing method

Inventor: Kouichi Tamura
Patented Case View Patent ↗
Granted: Jul 30, 1996 Filed: Mar 29, 1995
Inventor
Kouichi Tamura
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 5,541,973
App. No.
08/412,665
Filed
1995-03-29
Granted
1996-07-30
Kind
A