Granted Patent
Utility
US 5,543,263 · App. 08/261,646
Photoresist having a low level of metal ions
Inventors:
M. Dalil Rahman, Dana L. Durham
Patented Case
View Patent ↗
Granted: Aug 6, 1996
Filed: Jun 17, 1994
Inventors
M. Dalil Rahman
Dana L. Durham
Assignee (at issue)
Hoechst Celanese Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.