Granted Patent
Utility
US 5,543,353 · App. 08/282,587
Method of manufacturing a semiconductor photonic integrated circuit
Inventors:
Makoto Suzuki, Masahiro Aoki, Makoto Takahashi, Tsuyoshi Taniwatari
Patented Case
View Patent ↗
Granted: Aug 6, 1996
Filed: Jul 29, 1994
Inventors
Makoto Suzuki
Masahiro Aoki
Makoto Takahashi
Tsuyoshi Taniwatari
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.