Granted Patent
Utility
US 5,543,361 · App. 08/351,843
Process for forming titanium silicide local interconnect
Inventors:
Steven S. Lee, Kenneth P. Fuchs, Gayle W. Miller
Patented Case
View Patent ↗
Granted: Aug 6, 1996
Filed: Dec 8, 1994
Inventors
Steven S. Lee
Kenneth P. Fuchs
Gayle W. Miller
Assignees (at issue)
AT&T Global Information Solutions Company
Hyundai Electronics America
Symbios Logic Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.