Granted Patent
Utility
US 5,543,919 · App. 08/309,516
Apparatus and method for performing high spatial resolution thin film layer thickness metrology
Inventor:
Peter B. Mumola
Patented Case
View Patent ↗
Granted: Aug 6, 1996
Filed: Sep 20, 1994
Inventor
Peter B. Mumola
Assignee (at issue)
Integrated Process Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.