IP Library Granted Patent US 5,545,868
Granted Patent Utility
US 5,545,868 · App. 08/244,127

Superhigh purity fluid supply pipe system and method of installing the same

Inventors: Tadahiro Ohmi, Masakazu Nakamura
Patented Case View Patent ↗
Granted: Aug 13, 1996 Filed: May 19, 1994
Inventors
Tadahiro Ohmi
Masakazu Nakamura
Assignee (at issue)
Tadahiro Ohmi

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Quick Facts
Patent No.
US 5,545,868
App. No.
08/244,127
Filed
1994-05-19
Granted
1996-08-13
Kind
A