Granted Patent
Utility
US 5,547,896 · App. 08/387,233
Direct etch for thin film resistor using a hard mask
Inventors:
Jack H. Linn, John T. Gasner, Stephen Joseph Gaul, Chris A. McCarty
Patented Case
View Patent ↗
Granted: Aug 20, 1996
Filed: Feb 13, 1995
Inventors
Jack H. Linn
John T. Gasner
Stephen Joseph Gaul
Chris A. McCarty
Assignee (at issue)
HARRIS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.