Granted Patent
Utility
US 5,548,211 · App. 08/400,199
Dynamic fault imaging system using electron beam and method of analyzing fault
Inventors:
Tohru Tujide, Toyokazu Nakamura, Kiyoshi Nikawa
Patented Case
View Patent ↗
Granted: Aug 20, 1996
Filed: Mar 3, 1995
Inventors
Tohru Tujide
Toyokazu Nakamura
Kiyoshi Nikawa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.