Granted Patent
Utility
US 5,550,004 · App. 08/292,899
Chemically amplified radiation-sensitive composition
Inventor:
Kenji Honda
Patented Case
View Patent ↗
Granted: Aug 27, 1996
Filed: Aug 19, 1994
Inventor
Kenji Honda
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.