Granted Patent
Utility
US 5,550,007 · App. 08/068,485
Surface-imaging technique for lithographic processes for device fabrication
Inventors:
Gary N. Taylor, David R. Wheeler
Patented Case
View Patent ↗
Granted: Aug 27, 1996
Filed: May 28, 1993
Inventors
Gary N. Taylor
David R. Wheeler
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.