Granted Patent
Utility
US 5,554,413 · App. 08/254,669
Method of manufacturing electronic device and apparatus for manufacturing the same
Inventors:
Masaru Nikaido, Hidemi Kanetaka, Hideki Yamaguchi
Patented Case
View Patent ↗
Granted: Sep 10, 1996
Filed: Jun 6, 1994
Inventors
Masaru Nikaido
Hidemi Kanetaka
Hideki Yamaguchi
Assignee (at issue)
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.