Granted Patent
Utility
US 5,554,567 · App. 08/299,268
Method for improving adhesion to a spin-on-glass
Inventor:
Shih-Ming Wang
Patented Case
View Patent ↗
Granted: Sep 10, 1996
Filed: Sep 1, 1994
Inventor
Shih-Ming Wang
Assignee (at issue)
Taiwan Semiconductor Manufacturing Company, Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.