Granted Patent
Utility
US 5,554,875 · App. 08/486,156
Semiconductor device with force and/or acceleration sensor
Inventor:
Siegbert Hartauer
Patented Case
View Patent ↗
Granted: Sep 10, 1996
Filed: Jun 7, 1995
Inventor
Siegbert Hartauer
Assignee (at issue)
TEXAS INSTRUMENTS DEUTSCHLAND GMBH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.