Granted Patent
Utility
US 5,555,472 · App. 08/179,594
Method and apparatus for measuring film thickness in multilayer thin film stack by comparison to a reference library of theoretical signatures
Inventors:
Paul J. Clapis, Keith Daniell
Patented Case
View Patent ↗
Granted: Sep 10, 1996
Filed: Dec 22, 1993
Inventors
Paul J. Clapis
Keith Daniell
Assignee (at issue)
Integrated Process Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.