Granted Patent
Utility
US 5,555,474 · App. 08/360,535
Automatic rejection of diffraction effects in thin film metrology
Inventor:
Anthony M. Ledger
Patented Case
View Patent ↗
Granted: Sep 10, 1996
Filed: Dec 21, 1994
Inventor
Anthony M. Ledger
Assignee (at issue)
Integrated Process Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.