IP Library Granted Patent US 5,556,734
Granted Patent Utility
US 5,556,734 · App. 08/363,269

Radiation sensitive resin composition comprising copolymer of isopropenylphenol and T-butyl(meth)acrylate

Inventors: Mikio Yamachika, Eiichi Kobayashi, Toshiyuki Ota, Akira Tsuji
Patented Case View Patent ↗
Granted: Sep 17, 1996 Filed: Dec 23, 1994
Inventors
Mikio Yamachika
Eiichi Kobayashi
Toshiyuki Ota
Akira Tsuji
Assignee (at issue)
Japan Synthetic Rubber Corporation

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Quick Facts
Patent No.
US 5,556,734
App. No.
08/363,269
Filed
1994-12-23
Granted
1996-09-17
Kind
A