Granted Patent
Utility
US 5,563,709 · App. 08/304,983
Apparatus for measuring, thinning and flattening silicon structures
Inventor:
Sherman K. Poultney
Patented Case
View Patent ↗
Granted: Oct 8, 1996
Filed: Sep 13, 1994
Inventor
Sherman K. Poultney
Assignee (at issue)
Integrated Process Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.