Granted Patent
Utility
US 5,565,304 · App. 08/463,251
Chemically amplified radiation-sensitive composition used in a process for fabricating a semiconductor device
Inventor:
Kenji Honda
Patented Case
View Patent ↗
Granted: Oct 15, 1996
Filed: Jun 5, 1995
Inventor
Kenji Honda
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.