IP Library › Granted Patent US 5,567,255
Granted Patent Utility
US 5,567,255 · App. 08/322,820

Solid annular gas discharge electrode

Inventor: George N. Steinberg
Patented Case View Patent ↗
Granted: Oct 22, 1996 Filed: Oct 13, 1994
Inventor
George N. Steinberg
Assignee (at issue)
Integrated Process Equipment Corporation

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Quick Facts
Patent No.
US 5,567,255
App. No.
08/322,820
Filed
1994-10-13
Granted
1996-10-22
Kind
A