Granted Patent
Utility
US 5,568,015 · App. 08/389,250
Fluid-cooled dielectric window for a plasma system
Inventors:
William M. Holber, Donald K. Smith, Matthew Besen, Matthew P. Fitzner, Eric Georgelis
Patented Case
View Patent ↗
Granted: Oct 22, 1996
Filed: Feb 16, 1995
Inventors
William M. Holber
Donald K. Smith
Matthew Besen
Matthew P. Fitzner
Eric Georgelis
Assignee (at issue)
Applied Science & Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.