Granted Patent
Utility
US 5,572,059 · App. 08/477,718
Thermal isolation of hybrid thermal detectors through an anisotropic etch
Inventors:
William K. Walker, Steven N. Frank, Charles M. Hanson, Robert J. S. Kyle, Edward G. Meissner, Robert A. Owen, Gail D. Shelton
Patented Case
View Patent ↗
Granted: Nov 5, 1996
Filed: Jun 7, 1995
Inventors
William K. Walker
Steven N. Frank
Charles M. Hanson
Robert J. S. Kyle
Edward G. Meissner
Robert A. Owen
Gail D. Shelton
Assignee (at issue)
Texas Instruments Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.