Granted Patent
Utility
US 5,573,566 · App. 08/451,926
Method of making a quartz dome reactor chamber
Inventors:
Dane H. Anderberg, Lewis C. Barnett
Patented Case
View Patent ↗
Granted: Nov 12, 1996
Filed: May 26, 1995
Inventors
Dane H. Anderberg
Lewis C. Barnett
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.