IP Library › Granted Patent US 5,576,247
Granted Patent Utility
US 5,576,247 · App. 08/097,231

Thin layer forming method wherein hydrophobic molecular layers preventing a BPSG layer from absorbing moisture

Inventors: Kousaku Yano, Masayuki Endo, Yuka Terai, Noboru Nomura, Tomoyasu Murakami, Tetsuya Ueda, Satoshi Ueda
Patented Case View Patent ↗
Granted: Nov 19, 1996 Filed: Jul 27, 1993
Inventors
Kousaku Yano
Masayuki Endo
Yuka Terai
Noboru Nomura
Tomoyasu Murakami
Tetsuya Ueda
Satoshi Ueda
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.

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Quick Facts
Patent No.
US 5,576,247
App. No.
08/097,231
Filed
1993-07-27
Granted
1996-11-19
Kind
A