Granted Patent
Utility
US 5,576,249 · App. 07/260,980
Electrochemically etched multilayer semiconductor structures
Inventor:
Wei Wu
Patented Case
View Patent ↗
Granted: Nov 19, 1996
Filed: Oct 21, 1988
Inventor
Wei Wu
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.