Granted Patent
Utility
US 5,577,621 · App. 08/353,255
Wafer installing cassette for semiconductor manufacturing apparatus
Inventor:
Kyoung Soo YI
Patented Case
View Patent ↗
Granted: Nov 26, 1996
Filed: Dec 2, 1994
Inventor
Kyoung Soo YI
Assignee (at issue)
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.