Granted Patent
Utility
US 5,578,129 · App. 08/516,361
Gas supplying head and load lock chamber of semiconductor processing system
Inventor:
Shuji Moriya
Patented Case
View Patent ↗
Granted: Nov 26, 1996
Filed: Aug 17, 1995
Inventor
Shuji Moriya
Assignee (at issue)
Tokyo Electron Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.