Granted Patent
Utility
US 5,578,822 · App. 08/419,493
Particle-optical apparatus comprising a detector for secondary electrons
Inventors:
Karel Diederick Van Der Mast, Pieter Kruit, Kars Z. Troost, Alexander Henstra
Patented Case
View Patent ↗
Granted: Nov 26, 1996
Filed: Apr 10, 1995
Inventors
Karel Diederick Van Der Mast
Pieter Kruit
Kars Z. Troost
Alexander Henstra
Assignee (at issue)
U.S. Philips Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.